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[Data] Example of EPMA Analysis 2

Analysis by EPMA can detect using PET and PETH spectroscopic crystals, allowing for peak separation of 17Cl and 47Ag!

EPMA has superior detection resolution compared to EDX. Even in cases where the detection positions of elements are close in EDX, making peak separation difficult, it may be possible to achieve peak separation with EPMA. This document introduces the peak separation of 47Ag and 17Cl. It includes cross-sectional observations of chip resistors, X-ray spectra of 47Ag, and mapping comparisons. [Contents] - Peak separation of 47Ag and 17Cl - X-ray spectrum of 47Ag - Mapping comparison *For more details, please refer to the PDF document or feel free to contact us.

  • Analysis and prediction system
  • Probe Microanalyzer

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Example of EPMA analysis using the guide network map method.

Comprehensive analysis is possible! Here are examples of analysis using the EPMA guide network map method.

One of the features of EPMA is the guide network mapping method. In SEM-EDX, the measurement range is narrow, and surface analysis may not be accurately measured on curved samples. However, by using the guide network mapping method of EPMA, extensive analysis becomes possible. This method automatically measures adjacent continuous areas and displays them collectively, making it useful for measuring surfaces with uneven height differences or for measuring large surfaces. 【Features of the Guide Network Mapping Method】 ■ A method for automatically measuring adjacent continuous areas and displaying them collectively. ■ Used for measuring surfaces with uneven height differences or for measuring large surfaces. *For more details, please refer to the PDF materials or feel free to contact us.

  • Analysis and prediction system
  • Probe Microanalyzer

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